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Axcelis Technologies Inc

ACLS
Exchange
Nasdaq
Industry
Special Industry Machinery, NEC
SEC CIK
0001113232

No open-market purchases or sales by Axcelis Technologies Inc insiders were filed in the last 90 days; 441 institutions reported holding it in 13F filings for Q2 2026, worth $5.87B in total; Maverick Capital is the only superinvestor holding it.

13F holders, Q1 2026

Institutional positions in Axcelis Technologies Inc as of Mar 31, 2026. Investment managers with $100 million or more in US stocks report their long positions on Form 13F within 45 days after each quarter ends. How 13F works

Institutional holders
380
+11 vs. Q4 2025
Shares held
32.6M
+5.38M (+19.8%) vs. Q4 2025
Total value
$3.03B
+$843.1M (+38.5%) vs. Q4 2025
New holders
70
100 more added
Sold out
59
134 more reduced

4 institutions that held it in Q4 2025 haven't filed for Q1 2026 yet. Not filing isn't selling, so they aren't counted as sold out or in the changes above.

Compare with Q4 2025: new holders, sold out and not filed yet

Holders and value by quarter

Institutions reporting ACLS on Form 13F each quarter since Q1 2021, and the total value they reported. Values are as of each quarter end, so they also move with the share price.

Institutional holdersQ1 2026: 380 institutions
Q1 2021: 192 institutionsQ2 2021: 188 institutionsQ3 2021: 204 institutionsQ4 2021: 254 institutionsQ1 2022: 290 institutionsQ2 2022: 277 institutionsQ3 2022: 287 institutionsQ4 2022: 328 institutionsQ1 2023: 379 institutionsQ2 2023: 406 institutionsQ3 2023: 421 institutionsQ4 2023: 421 institutionsQ1 2024: 384 institutionsQ2 2024: 392 institutionsQ3 2024: 369 institutionsQ4 2024: 325 institutionsQ1 2025: 307 institutionsQ2 2025: 330 institutionsQ3 2025: 362 institutionsQ4 2025: 373 institutionsQ1 2026: 380 institutionsQ2 2026: 441 institutions
Value heldQ1 2026: $3.03B
Q1 2021: $1.20BQ2 2021: $1.17BQ3 2021: $1.37BQ4 2021: $2.06BQ1 2022: $2.05BQ2 2022: $1.52BQ3 2022: $1.72BQ4 2022: $2.32BQ1 2023: $4.00BQ2 2023: $5.41BQ3 2023: $4.85BQ4 2023: $3.95BQ1 2024: $3.57BQ2 2024: $4.38BQ3 2024: $3.19BQ4 2024: $2.16BQ1 2025: $1.54BQ2 2025: $2.22BQ3 2025: $2.98BQ4 2025: $2.52BQ1 2026: $3.03BQ2 2026: $5.87B
Institutions holding ACLS and their total value by quarter
QuarterHoldersValue
Q2 2026441$5.87B
Q1 2026380$3.03B
Q4 2025373$2.52B
Q3 2025362$2.98B
Q2 2025330$2.22B
Q1 2025307$1.54B
Q4 2024325$2.16B
Q3 2024369$3.19B
Q2 2024392$4.38B
Q1 2024384$3.57B
Q4 2023421$3.95B
Q3 2023421$4.85B
Q2 2023406$5.41B
Q1 2023379$4.00B
Q4 2022328$2.32B
Q3 2022287$1.72B
Q2 2022277$1.52B
Q1 2022290$2.05B
Q4 2021254$2.06B
Q3 2021204$1.37B
Q2 2021188$1.17B
Q1 2021192$1.20B

Institutions, Q1 2026

Shares, value and share of portfolio for each institution holding Axcelis Technologies Inc; share changes are against Q4 2025.

Institutions holding ACLS in Q1 2026
InstitutionSharesValue% of portfolioChange in sharesAction
BlackRock, Inc.4,936,774$459.5M0.01%+109,199+2.3%Added
Vanguard Portfolio Management LLC2,488,293$231.6M0.01%+2,488,293New
FMR LLC2,431,121$226.3M0.01%+1,820,518+298.2%Added
Reinhart Partners, Inc.1,657,745$154.3M4.44%+67,847+4.3%Added
Vanguard Capital Management LLC1,382,770$128.7M0.00%+1,382,770New
Balyasny Asset Management LLC1,364,540$127.0M0.25%+1,121,037+460.4%Added
Victory Capital Management Inc1,279,005$119.0M0.08%−528,399−29.2%Reduced
State Street Corp1,189,045$110.7M0.00%+2,818+0.2%Added
BNP PARIBAS ASSET MANAGEMENT Holding S.A.1,006,028$93.6M0.11%−85,066−7.8%Reduced
American Century Companies Inc951,914$88.6M0.05%−281,732−22.8%Reduced
Dimensional Fund Advisors LP844,097$78.6M0.02%+3,057+0.4%Added
Geode Capital Management, LLC811,264$75.5M0.00%−106,483−11.6%Reduced
Primecap Management Co658,652$61.3M0.05%−6,290−0.9%Reduced
Morgan Stanley581,636$54.1M0.00%+231,416+66.1%Added
D. E. Shaw & Co., Inc.544,421$50.7M0.04%+74,136+15.8%Added
Goldman Sachs Group Inc497,624$46.3M0.01%−132,190−21.0%Reduced
Manufacturers Life Insurance Company, The491,745$45.8M0.04%+477,705+3,402.5%Added
Charles Schwab Investment Management Inc445,769$41.5M0.01%+14,574+3.4%Added
LSV Asset Management429,500$40.0M0.09%00.0%Unchanged
Northern Trust Corp416,703$38.8M0.01%+11,557+2.9%Added
Boston Trust Walden Corp378,525$35.2M0.29%−49,211−11.5%Reduced
UBS Group AG377,237$35.1M0.01%+163,849+76.8%Added
Price T Rowe Associates Inc362,202$33.7M0.00%−20,854−5.4%Reduced
Boston Partners340,275$31.8M0.03%−82,160−19.4%Reduced
Grantham, Mayo, Van Otterloo & Co. LLC334,786$31.2M0.08%+11,937+3.7%Added
Allspring Global Investments Holdings, LLC258,536$24.7M0.04%−7,479−2.8%Reduced
JPMorgan Chase & Co222,714$20.1M0.00%−134,788−37.7%Reduced
Principal Financial Group Inc210,202$19.6M0.01%+10,177+5.1%Added
Federated Hermes, Inc.209,198$19.5M0.03%−67,068−24.3%Reduced
Vanguard Fiduciary Trust Co200,465$18.7M0.00%+200,465New
Segall Bryant & Hamill, LLC200,371$18.7M0.27%+98,184+96.1%Added
Bank of New York Mellon Corp199,672$18.6M0.00%−3,864−1.9%Reduced
Two Sigma Investments, LP197,566$18.4M0.02%+126,322+177.3%Added
Kennedy Capital Management, Inc.178,016$16.6M0.35%−27,721−13.5%Reduced
Invesco Ltd.165,075$15.4M0.00%−313,822−65.5%Reduced
BNP Paribas Arbitrage, SA144,678$13.5M0.01%−19,349−11.8%Reduced
First Trust Advisors LP137,779$12.8M0.01%+49,383+55.9%Added
Royce & Associates LP125,280$11.7M0.12%+8,905+7.7%Added
Bank of America Corp110,999$10.3M0.00%−7,207−6.1%Reduced
Public Sector Pension Investment Board109,791$10.2M0.03%−19,986−15.4%Reduced
First Eagle Investment Management, LLC100,551$9.36M0.02%−35,767−26.2%Reduced
Emerald Advisers, LLC96,238$8.96M0.28%+96,238New
Rhumbline Advisers87,307$8.13M0.01%−802−0.9%Reduced
Sagefield Capital LP82,238$7.65M0.55%+82,238New
Ameriprise Financial Inc78,695$7.32M0.00%−7,362−8.6%Reduced
Creative Planning77,712$7.23M0.00%+4,212+5.7%Added
Portolan Capital Management, LLC77,168$7.18M0.38%+77,168New
Legal & General Group Plc71,909$6.69M0.00%−6,146−7.9%Reduced
Nuveen, LLC71,385$6.64M0.00%+992+1.4%Added
Susquehanna Portfolio Strategies, LLC68,213$6.35M0.09%00.0%Unchanged
UBS Asset Management Americas Inc64,550$6.01M0.00%+3,453+5.7%Added
Swiss National Bank61,200$5.70M0.00%00.0%Unchanged
Wells Fargo & Company51,701$4.81M0.00%−28,051−35.2%Reduced
Holocene Advisors, LP51,575$4.80M0.01%+35,896+228.9%Added
QSM Asset Management Ltd51,571$4.63M2.27%−1,595−3.0%Reduced
Mercer Global Advisors Inc47,976$4.47M0.01%+44,255+1,189.3%Added
Great Lakes Advisors, LLC47,594$4.43M0.04%+47,594New
Emerald Mutual Fund Advisers Trust47,412$4.41M0.21%+47,412New
SEI Investments Co45,035$4.19M0.00%+17,059+61.0%Added
Globeflex Capital L P44,455$4.14M0.63%−11,542−20.6%Reduced
Voloridge Investment Management, LLC44,246$4.12M0.02%−176,467−80.0%Reduced
Needham Investment Management LLC42,500$3.96M0.20%+22,500+112.5%Added
Old West Investment Management, LLC42,481$3.95M0.43%+24,417+135.2%Added
Harbor Capital Advisors, Inc.41,831$3.89M0.32%−2,856−6.4%Reduced
ARGA Investment Management, LP41,408$3.85M0.13%+22,874+123.4%Added
State of Wisconsin Investment Board41,207$3.84M0.01%−9,299−18.4%Reduced
Ossiam40,700$3.79M0.07%00.0%Unchanged
Amundi40,627$3.78M0.00%+3,353+9.0%Added
Allianz Asset Management GmbH40,133$3.74M0.00%+40,133New
AQR Capital Management LLC40,015$3.72M0.00%+2,434+6.5%Added
Emerald Investment Advisers, LLC39,764$3.70M0.33%+39,764New
Isthmus Partners, LLC39,357$3.66M0.38%−2,123−5.1%Reduced
Empowered Funds, LLC39,087$3.64M0.02%+39,087New
Bridges Investment Management Inc38,637$3.60M0.05%+10,237+36.0%Added
Bessemer Group Inc38,001$3.54M0.01%+29+0.1%Added
California State Teachers Retirement System36,420$3.39M0.00%+6,390+21.3%Added
Alberta Investment Management Corp35,750$3.33M0.02%+35,750New
Barclays PLC35,371$3.29M0.00%−40,611−53.4%Reduced
Voleon Capital Management LP35,221$3.28M0.07%+35,221New
Toronto Dominion Bank34,008$3.17M0.01%+34,008New
Squarepoint Ops LLC33,291$3.10M0.01%−120,412−78.3%Reduced
Envestnet Asset Management Inc31,781$2.96M0.00%−20,716−39.5%Reduced
Prudential Financial Inc31,377$2.92M0.00%−8,188−20.7%Reduced
Alliancebernstein L.P.34,489$2.77M0.00%+243+0.7%Added
Inspire Advisors, LLC29,411$2.74M0.22%+29,411New
Mitsubishi UFJ Kokusai Asset Management Co., Ltd.29,121$2.71M0.00%00.0%Unchanged
Deutsche Bank AG28,859$2.69M0.00%+2,939+11.3%Added
Vanguard Asset Management, Ltd27,199$2.53M0.00%+27,199New
Franklin Resources Inc26,719$2.49M0.00%−6,529−19.6%Reduced
Great West Life Assurance Co25,154$2.34M0.00%−1,148−4.4%Reduced
Abn Amro Investment Solutions24,650$2.29M0.03%−148−0.6%Reduced
Citigroup Inc24,645$2.29M0.00%−85,825−77.7%Reduced
Paradigm Capital Management Inc24,000$2.23M0.09%−32,000−57.1%Reduced
Yakira Capital Management, Inc.22,619$2.11M0.62%+22,619New
Stifel Financial Corp22,584$2.10M0.00%−1,763−7.2%Reduced
LPL Financial LLC22,497$2.09M0.00%−12,077−34.9%Reduced
Janney Montgomery Scott LLC22,150$2.06M0.01%−286−1.3%Reduced
State of Alaska, Department of Revenue21,979$2.04M0.02%−589−2.6%Reduced
Hussman Strategic Advisors, Inc.21,000$1.95M0.42%+21,000New
Thrivent Financial for Lutherans20,491$1.91M0.00%−810−3.8%Reduced