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Axcelis Technologies Inc

ACLS
Exchange
Nasdaq
Industry
Special Industry Machinery, NEC
SEC CIK
0001113232

No open-market purchases or sales by Axcelis Technologies Inc insiders were filed in the last 90 days; 442 institutions reported holding it in 13F filings for Q2 2026, worth $5.85B in total; Maverick Capital is the only superinvestor holding it.

13F holders, Q1 2026

Institutional positions in Axcelis Technologies Inc as of Mar 31, 2026. Investment managers with $100 million or more in US stocks report their long positions on Form 13F within 45 days after each quarter ends. How 13F works

Institutional holders
380
+12 vs. Q4 2025
Shares held
32.6M
+5.48M (+20.2%) vs. Q4 2025
Total value
$3.03B
+$851.0M (+39.0%) vs. Q4 2025
New holders
70
99 more added
Sold out
58
134 more reduced

5 institutions that held it in Q4 2025 haven't filed for Q1 2026 yet. Not filing isn't selling, so they aren't counted as sold out or in the changes above.

Compare with Q4 2025: new holders, sold out and not filed yet

Holders and value by quarter

Institutions reporting ACLS on Form 13F each quarter since Q1 2021, and the total value they reported. Values are as of each quarter end, so they also move with the share price.

Institutional holdersQ1 2026: 380 institutions
Q1 2021: 193 institutionsQ2 2021: 189 institutionsQ3 2021: 205 institutionsQ4 2021: 254 institutionsQ1 2022: 290 institutionsQ2 2022: 277 institutionsQ3 2022: 287 institutionsQ4 2022: 327 institutionsQ1 2023: 379 institutionsQ2 2023: 406 institutionsQ3 2023: 421 institutionsQ4 2023: 421 institutionsQ1 2024: 385 institutionsQ2 2024: 393 institutionsQ3 2024: 369 institutionsQ4 2024: 325 institutionsQ1 2025: 307 institutionsQ2 2025: 330 institutionsQ3 2025: 362 institutionsQ4 2025: 373 institutionsQ1 2026: 380 institutionsQ2 2026: 442 institutions
Value heldQ1 2026: $3.03B
Q1 2021: $1.20BQ2 2021: $1.17BQ3 2021: $1.37BQ4 2021: $2.05BQ1 2022: $2.05BQ2 2022: $1.52BQ3 2022: $1.72BQ4 2022: $2.31BQ1 2023: $3.86BQ2 2023: $5.41BQ3 2023: $4.85BQ4 2023: $3.81BQ1 2024: $3.37BQ2 2024: $4.35BQ3 2024: $3.17BQ4 2024: $2.16BQ1 2025: $1.54BQ2 2025: $2.20BQ3 2025: $2.96BQ4 2025: $2.52BQ1 2026: $3.03BQ2 2026: $5.85B
Institutions holding ACLS and their total value by quarter
QuarterHoldersValue
Q2 2026442$5.85B
Q1 2026380$3.03B
Q4 2025373$2.52B
Q3 2025362$2.96B
Q2 2025330$2.20B
Q1 2025307$1.54B
Q4 2024325$2.16B
Q3 2024369$3.17B
Q2 2024393$4.35B
Q1 2024385$3.37B
Q4 2023421$3.81B
Q3 2023421$4.85B
Q2 2023406$5.41B
Q1 2023379$3.86B
Q4 2022327$2.31B
Q3 2022287$1.72B
Q2 2022277$1.52B
Q1 2022290$2.05B
Q4 2021254$2.05B
Q3 2021205$1.37B
Q2 2021189$1.17B
Q1 2021193$1.20B

Institutions, Q1 2026

Shares, value and share of portfolio for each institution holding Axcelis Technologies Inc; share changes are against Q4 2025.

Institutions holding ACLS in Q1 2026
InstitutionSharesValue% of portfolioChange in sharesAction
Toronto Dominion Bank34,008$3.17M0.01%+34,008New
Voleon Capital Management LP35,221$3.28M0.07%+35,221New
Barclays PLC35,371$3.29M0.00%−40,611−53.4%Reduced
Alberta Investment Management Corp35,750$3.33M0.02%+35,750New
California State Teachers Retirement System36,420$3.39M0.00%+6,390+21.3%Added
Bessemer Group Inc38,001$3.54M0.01%+29+0.1%Added
Bridges Investment Management Inc38,637$3.60M0.05%+10,237+36.0%Added
Empowered Funds, LLC39,087$3.64M0.02%+39,087New
Isthmus Partners, LLC39,357$3.66M0.38%−2,123−5.1%Reduced
Emerald Investment Advisers, LLC39,764$3.70M0.33%+39,764New
AQR Capital Management LLC40,015$3.72M0.00%+2,434+6.5%Added
Allianz Asset Management GmbH40,133$3.74M0.00%+40,133New
Amundi40,627$3.78M0.00%+3,353+9.0%Added
Ossiam40,700$3.79M0.07%00.0%Unchanged
State of Wisconsin Investment Board41,207$3.84M0.01%−9,299−18.4%Reduced
ARGA Investment Management, LP41,408$3.85M0.13%+22,874+123.4%Added
Harbor Capital Advisors, Inc.41,831$3.89M0.32%−2,856−6.4%Reduced
Old West Investment Management, LLC42,481$3.95M0.43%+24,417+135.2%Added
Needham Investment Management LLC42,500$3.96M0.20%+22,500+112.5%Added
Voloridge Investment Management, LLC44,246$4.12M0.02%−176,467−80.0%Reduced
Globeflex Capital L P44,455$4.14M0.63%−11,542−20.6%Reduced
SEI Investments Co45,035$4.19M0.00%+17,059+61.0%Added
Emerald Mutual Fund Advisers Trust47,412$4.41M0.21%+47,412New
Great Lakes Advisors, LLC47,594$4.43M0.04%+47,594New
Mercer Global Advisors Inc47,976$4.47M0.01%+44,255+1,189.3%Added
QSM Asset Management Ltd51,571$4.63M2.27%−1,595−3.0%Reduced
Holocene Advisors, LP51,575$4.80M0.01%+35,896+228.9%Added
Wells Fargo & Company51,701$4.81M0.00%−28,051−35.2%Reduced
Swiss National Bank61,200$5.70M0.00%00.0%Unchanged
UBS Asset Management Americas Inc64,550$6.01M0.00%+3,453+5.7%Added
Susquehanna Portfolio Strategies, LLC68,213$6.35M0.09%00.0%Unchanged
Nuveen, LLC71,385$6.64M0.00%+992+1.4%Added
Legal & General Group Plc71,909$6.69M0.00%−6,146−7.9%Reduced
Portolan Capital Management, LLC77,168$7.18M0.38%+77,168New
Creative Planning77,712$7.23M0.00%+4,212+5.7%Added
Ameriprise Financial Inc78,695$7.32M0.00%−7,362−8.6%Reduced
Sagefield Capital LP82,238$7.65M0.55%+82,238New
Rhumbline Advisers87,307$8.13M0.01%−802−0.9%Reduced
Emerald Advisers, LLC96,238$8.96M0.28%+96,238New
First Eagle Investment Management, LLC100,551$9.36M0.02%−35,767−26.2%Reduced
Public Sector Pension Investment Board109,791$10.2M0.03%−19,986−15.4%Reduced
Bank of America Corp110,999$10.3M0.00%−7,207−6.1%Reduced
Royce & Associates LP125,280$11.7M0.12%+8,905+7.7%Added
First Trust Advisors LP137,779$12.8M0.01%+49,383+55.9%Added
BNP Paribas Arbitrage, SA144,678$13.5M0.01%−19,349−11.8%Reduced
Invesco Ltd.165,075$15.4M0.00%−313,822−65.5%Reduced
Kennedy Capital Management, Inc.178,016$16.6M0.35%−27,721−13.5%Reduced
Two Sigma Investments, LP197,566$18.4M0.02%+126,322+177.3%Added
Bank of New York Mellon Corp199,672$18.6M0.00%−3,864−1.9%Reduced
Segall Bryant & Hamill, LLC200,371$18.7M0.27%+98,184+96.1%Added
Vanguard Fiduciary Trust Co200,465$18.7M0.00%+200,465New
Federated Hermes, Inc.209,198$19.5M0.03%−67,068−24.3%Reduced
Principal Financial Group Inc210,202$19.6M0.01%+10,177+5.1%Added
JPMorgan Chase & Co222,714$20.1M0.00%−134,788−37.7%Reduced
Allspring Global Investments Holdings, LLC258,536$24.7M0.04%−7,479−2.8%Reduced
Grantham, Mayo, Van Otterloo & Co. LLC334,786$31.2M0.08%+11,937+3.7%Added
Boston Partners340,275$31.8M0.03%−82,160−19.4%Reduced
Price T Rowe Associates Inc362,202$33.7M0.00%−20,854−5.4%Reduced
UBS Group AG377,237$35.1M0.01%+163,849+76.8%Added
Boston Trust Walden Corp378,525$35.2M0.29%−49,211−11.5%Reduced
Northern Trust Corp416,703$38.8M0.01%+11,557+2.9%Added
LSV Asset Management429,500$40.0M0.09%00.0%Unchanged
Charles Schwab Investment Management Inc445,769$41.5M0.01%+14,574+3.4%Added
Manufacturers Life Insurance Company, The491,745$45.8M0.04%+477,705+3,402.5%Added
Goldman Sachs Group Inc497,624$46.3M0.01%−132,190−21.0%Reduced
D. E. Shaw & Co., Inc.544,421$50.7M0.04%+74,136+15.8%Added
Morgan Stanley581,636$54.1M0.00%+231,416+66.1%Added
Primecap Management Co658,652$61.3M0.05%−6,290−0.9%Reduced
Geode Capital Management, LLC811,264$75.5M0.00%−106,483−11.6%Reduced
Dimensional Fund Advisors LP844,097$78.6M0.02%+3,057+0.4%Added
American Century Companies Inc951,914$88.6M0.05%−281,732−22.8%Reduced
BNP PARIBAS ASSET MANAGEMENT Holding S.A.1,006,028$93.6M0.11%−85,066−7.8%Reduced
State Street Corp1,189,045$110.7M0.00%+2,818+0.2%Added
Victory Capital Management Inc1,279,005$119.0M0.08%−528,399−29.2%Reduced
Balyasny Asset Management LLC1,364,540$127.0M0.25%+1,121,037+460.4%Added
Vanguard Capital Management LLC1,382,770$128.7M0.00%+1,382,770New
Reinhart Partners, Inc.1,657,745$154.3M4.44%+67,847+4.3%Added
FMR LLC2,431,121$226.3M0.01%+1,820,518+298.2%Added
Vanguard Portfolio Management LLC2,488,293$231.6M0.01%+2,488,293New
BlackRock, Inc.4,936,774$459.5M0.01%+109,199+2.3%Added
Arrowstreet Capital, Limited Partnership0$00.00%−212,050−100.0%Sold out
Clark Capital Management Group, Inc.0$00.00%−110,294−100.0%Sold out
BlackBarn Capital Partners LP0$00.00%−96,573−100.0%Sold out
Zacks Investment Management0$00.00%−88,080−100.0%Sold out
Jane Street Group, LLC0$00.00%−79,049−100.0%Sold out
Renaissance Technologies LLC0$00.00%−66,899−100.0%Sold out
Soviero Asset Management, LP0$00.00%−46,000−100.0%Sold out
F/M Investments LLC0$00.00%−40,294−100.0%Sold out
Bridgeway Capital Management, LLC0$00.00%−36,000−100.0%Sold out
Quest Partners LLC0$00.00%−26,367−100.0%Sold out
Algert Global LLC0$00.00%−25,340−100.0%Sold out
Aquatic Capital Management LLC0$00.00%−22,642−100.0%Sold out
Elo Mutual Pension Insurance Co0$00.00%−22,446−100.0%Sold out
Jackson Creek Investment Advisors LLC0$00.00%−22,054−100.0%Sold out
Verition Fund Management LLC0$00.00%−21,177−100.0%Sold out
Tudor Investment Corp Et Al0$00.00%−20,741−100.0%Sold out
Dynamic Technology Lab Private Ltd0$00.00%−19,470−100.0%Sold out
Mizuho Markets Cayman LP0$00.00%−18,816−100.0%Sold out
Wakefield Asset Management LLLP0$00.00%−18,133−100.0%Sold out
Oliver Luxxe Assets LLC0$00.00%−18,063−100.0%Sold out